Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Book Overview

Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps. In this topical volume, authors from...

• Format: Paperback
• Language: English
• ISBN: 3527335005
• ISBN13: 9783527335008
• Release Date: July 2014
• Publisher: Wiley-Vch
• Length: 529 Pages
• Weight: 2.30 lbs.
• Dimensions: 1.0" x 6.7" x 9.4"