ISBN: 0841233322
ISBN13: 9780841233324
Microelectronics Technology: Polymers for Advanced Imaging and Packaging (ACS Symposium Series)
ISBN: 0841233322
ISBN13: 9780841233324
Formats
Conditions
Formats
Conditions
Book Overview
Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes. Explores the design of low-dielectric polymer materials for microelectronic applications.
- Format:
- Hardcover
- Language:
- English
- ISBN:
- 0841233322
- ISBN13:
- 9780841233324
- Release Date:
- May 1995
- Publisher:
- American Chemical Society
- Length:
- 590 Pages
- Weight:
- 1.90 lbs.
- Dimensions:
- 9.5″ × 1.3″ × 6.3″
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