VLSI Fabrication Principles

By Sorab K. Ghandhi and Sorab Ghandi

Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Stresses fabrication criteria for such circuits as CMOS, bipolar, MOS, FET, etc. These diverse technologies are introduced separately and then consolidated into complete circuits. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.

• Format: Hardcover
• Language: English
• ISBN: 0471868337
• ISBN13: 9780471868330
• Release Date: January 1983
• Publisher: John Wiley & Sons
• Length: 665 Pages
• Weight: 2.50 lbs.

Customer Reviews

A must have for process engineers.

This book provides some valuable information on the processing of integrated circuits.