Ultra Clean Processing of Silicon Surfaces (Solid State Phenomena)

By: Marc Heyns

The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3908450578
• ISBN13: 9783908450573
• Release Date: December 2000
• Publisher: Scitec Publications
• Length: 340 Pages