Run-To-Run Control in Semiconductor Manufacturing

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

• Format: Hardcover
• Language: English
• ISBN: 0849311780
• ISBN13: 9780849311789
• Release Date: November 2000
• Publisher: CRC Press
• Length: 366 Pages
• Weight: 1.40 lbs.
• Dimensions: 0.9" x 6.3" x 9.5"