Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products

By Taniguchi

The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of
accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer). Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in
resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. Nanotechnology is concerned with integrated processing systems for measurement, position control, and processing technologies
in the sub-nm range. It will be essential in the fabrication of extremely precise and fine parts.

• Format: Hardcover
• Language: English
• ISBN: 0198562837
• ISBN13: 9780198562832
• Release Date: September 1996
• Publisher: Oxford University Press, USA
• Length: 424 Pages
• Weight: 0.95 lbs.
• Dimensions: 1.1" x 7.7" x 10.0"