Micro and Nano Machined Electrometers

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

• Format: Hardcover
• Language: English
• ISBN: 9811332460
• ISBN13: 9789811332463
• Release Date: February 2020
• Publisher: Springer
• Length: 220 Pages
• Weight: 1.10 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"