Lithography: Main Techniques

By Stefan Landis

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

• Format: Hardcover
• Language: English
• ISBN: 184821202X
• ISBN13: 9781848212022
• Release Date: December 2010
• Publisher: Wiley & Sons, Incorporated, John
• Length: 320 Pages
• Weight: 1.60 lbs.
• Dimensions: 1.1" x 6.1" x 9.2"