Handbook of Advanced Plasma Processing Techniques

Book Overview

Pattern transfer by dry etching and plasma-enhanced chemical vapor de- position are two of the cornerstone techniques for modern integrated cir- cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen- sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions...

• Format: Paperback
• Language: English
• ISBN: 3642630960
• ISBN13: 9783642630965
• Release Date: November 2012
• Publisher: Springer
• Length: 655 Pages
• Weight: 2.04 lbs.
• Dimensions: 1.4" x 6.1" x 9.2"