Fundamentals of Microfabrication

By Marc J. Madou

Book Overview

Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

• Format: Hardcover
• Language: English
• ISBN: 0849394511
• ISBN13: 9780849394515
• Release Date: January 1997
• Publisher: CRC Press
• Length: 589 Pages
• Weight: 4.55 lbs.
• Dimensions: 1.6" x 8.8" x 11.3"

Customer Reviews

"There's plenty of room at the bottom."

Feynman noted that back in 1959. Nanotechnology, MEMS, microfluidics, labs on a chip, and NEMS have all gotten a lot of press more recently. This encyclopedic book remains the bible of manufacturing at the very small scale. I do not know of a replacement book yet, though some sections of this one are getting quite dated, especially, as noted in another review, the clean room section.

Reference Resource

Comprehensive in-depth reference tool - this is how the book has been characterized by a university professor using it for his course instruction. I concur. Amazing amount of practical detail in one refernce. Dimensionally a bit large and gangly but likely would require mulitple volumes if in standard book size. The web page link is a nice feature given the fast moving topic. Cleanroom reference is out of date and could be updated given the reference focus. Text discusssions well written and unusually pleasant to read.

honey HE(Marc J. Madou) shrunk the world....

Nanotechnology and MEMS are among the active research areas world and will continue to be so during the next decade and paving way to new generation of taking an insight into micro world making this work "Fundamentals of Microfabrication" an important stepping stone for the better future. Marc J. Madou is internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication. This book will functions hand book for beginners. This book helps you explore the world of micromachines and miniaturization. The Ten chapters cover in detail, topics explaining the methodogy of microfabrications including micromachining technologies available today. Comparision of traditional and non-traditional microfabrication tools for different applications. The book also provides discussion about quantum structures and reviews molecular engineering. Appendices offer valuable information in an easily accessible format. Hyperlinked documents are provided for futher exploring the world of micromachining and microfabrication.

Fundamentals of Microfabrication

This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.