Atomic Layer Deposition

Atomic layer deposition (ALD) is a thin film deposition process renowned for its ability to produce layers with unrivaled control of thickness and composition, conformability to extreme three-dimensional structures, and versatility in the materials it can produce. These range from multi-component compounds to elemental metals and structures with compositions that can be adjusted over the thickness of the film. It has expanded from a small-scale...

• Format: Hardcover
• Language: English
• ISBN: 3039366521
• ISBN13: 9783039366521
• Release Date: August 2020
• Publisher: Mdpi AG
• Length: 142 Pages
• Weight: 1.12 lbs.
• Dimensions: 0.5" x 6.7" x 9.6"