Atomic Layer Deposition: Chemistry, Processing, and Applications

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Atomic Layer Deposition: Chemistry, Processing,...

Edition Description

Atomic Layer Deposition: Chemistry, Processing, and Applications offers a systematic overview of ALD, highlighting its scientific foundations, surface chemistry, and processing techniques. The book explores the origin and evolution of ALD, along with its key applications...

Edition Details

Format:Paperback

Language:English

ISBN:0443444137

Format: Paperback

Condition:

Release Date: Apr 1, 2027

Save $4.86!

List Price: ~~$235.00~~

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Atomic Layer Deposition: Chemistry, Processing,...

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