Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching and Piezoresistive Sensors Applications (Materials Science and Technologies)

By Mariana Amorim Fraga

Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 1613247745
• ISBN13: 9781613247747
• Release Date: November 2011
• Publisher: Nova Science Pub Inc
• Length: 106 Pages
• Weight: 0.45 lbs.
• Dimensions: 8.8" x 0.3" x 5.8"