Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

by North Carolina State University and Lucille A. Giannuzzi

Book Overview

Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools,...

• Format: Hardcover
• Language: English
• ISBN: 0387231161
• ISBN13: 9780387231167
• Release Date: November 2004
• Publisher: Springer
• Length: 357 Pages
• Weight: 1.55 lbs.
• Dimensions: 1.1" x 6.4" x 9.3"