X-ray Optics Made by X-ray Lithography: Process Optimization and Quality Control

By Frieder Johannes Koch

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

This work was published by Saint Philip Street Press pursuant to a Creative Commons license permitting commercial use. All rights not granted by the work's license are retained by the author or authors.

• Format: Hardcover
• Language: English
• ISBN: 1013280598
• ISBN13: 9781013280597
• Release Date: October 2020
• Publisher: Saint Philip Street Press
• Length: 160 Pages
• Weight: 1.47 lbs.
• Dimensions: 0.4" x 8.5" x 11.0"