User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

By U.S. Department of Commerce and nist

The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097)... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 1499211937
• ISBN13: 9781499211931
• Release Date: April 2014
• Publisher: Createspace Independent Publishing Platform
• Length: 254 Pages
• Weight: 1.31 lbs.
• Dimensions: 0.5" x 8.5" x 11.0"