Understanding Key Molecular Properties in a CVD Process Feasibility Study: Design of Volatile Non-halogenated Precursors for the Chemical Vapor Deposi [German]

By Rolf Claessen

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• Format: Paperback
• Language: German
• ISBN: 3831142742
• ISBN13: 9783831142743
• Release Date: August 2002
• Publisher: Bod - Books on Demand
• Length: 212 Pages
• Weight: 0.85 lbs.
• Dimensions: 0.5" x 7.4" x 9.7"