Ultraclean Technology Handbook: Ultrapure Water, Vol. 1

By Tadahiro Ohmi and Ohmi

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

• Format: Hardcover
• Language: English
• ISBN: 0824787536
• ISBN13: 9780824787530
• Release Date: July 2003
• Publisher: Dekker
• Length: 944 Pages
• Weight: 2.31 lbs.
• Dimensions: 10.0" x 2.0" x 7.5"