Ultra Clean Processing of Semiconductor Surfaces XI: Selected, Peer Reviewed Papers from the 11th International Symposium on Ultra Clean Processing of ... 2012, Gent, Belgium (Solid State Phenomena)

This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3037855274
• ISBN13: 9783037855270
• Release Date: January 2013
• Publisher: Trans Tech Pubn
• Length: 332 Pages
• Weight: 1.35 lbs.
• Dimensions: 9.3" x 0.8" x 6.8"