ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS Finfet Technology

By Wai Shing Lau

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

• Format: Hardcover
• Language: English
• ISBN: 9813222158
• ISBN13: 9789813222151
• Release Date: October 2017
• Publisher: World Scientific Publishing Company
• Length: 248 Pages
• Weight: 1.10 lbs.
• Dimensions: 0.8" x 6.0" x 9.1"