Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation: United States Patent 9988265

By: Quevy, Emmanuel P.

Trapped sacrificial structures and thin-film encapsulation methods that may be implemented to manufacture trapped sacrificial structures such as relative humidity sensor structures, and spacer structures that protect adjacent semiconductor structures extending above a semiconductor die substrate from being contacted by a molding tool or other semiconductor processing tool in an area of a die substrate adjacent the spacer structures.

• Format: Paperback
• Language: English
• ISBN: B08RGXBFFP
• ISBN13: 9798586320414
• Release Date: January 1
• Publisher: Independently Published
• Length: 28 Pages
• Weight: 0.20 lbs.
• Dimensions: 0.1" x 8.5" x 11.0"