Thin Films Material Technology: Sputtering of Compound Materials

By Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi, et al.

Book Overview

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3642059317
• ISBN13: 9783642059315
• Release Date: January 2013
• Publisher: Springer
• Length: 518 Pages
• Weight: 1.64 lbs.
• Dimensions: 1.1" x 6.1" x 9.2"