The Physics of Micro/Nano-Fabrication

By Julius J. Muray, Ivor Brodie, I. Brodie, Ivor;Muray, Julius J.;Murray, J.;Brodie, et al.

Book Overview

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

• Format: Paperback
• Language: English
• ISBN: 1441932216
• ISBN13: 9781441932211
• Release Date: December 2010
• Publisher: Springer
• Length: 622 Pages
• Weight: 2.53 lbs.
• Dimensions: 1.4" x 7.0" x 10.0"