Temperature Measurement During Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers

By Denise Reichel

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

• Format: Paperback
• Language: English
• ISBN: 3658113871
• ISBN13: 9783658113872
• Release Date: January 2016
• Publisher: Springer
• Length: 112 Pages
• Weight: 0.42 lbs.
• Dimensions: 0.3" x 5.8" x 8.3"