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Technologie MEMS: Une approche pour fabriquer d... [French]

By ANJLI SHARMA, Ho Seob Kim, Sanjeev K Kanth

Edition Description

Depuis la d?couverte de la microcolonne par Chang en 1980, les microcolonnes miniaturis?es ont suscit? un immense int?r?t en raison de leurs diverses applications, telles que la lithographie directe par faisceau d'?lectrons, les dispositifs ? faible co?t, les SEM ? faible tension...

Edition Details

Format:Paperback

Language:French

ISBN:6204156667

Format: Paperback

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Technologie MEMS: Une approche pour fabriquer d... [French]

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