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Sub-Half-Micron Lithography for Ulsis

Edition Description

In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However,...

Edition Details

Format:Paperback

Language:English

ISBN:0521022347

Format: Paperback

Condition:

53.00

Quantity:

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Sub-Half-Micron Lithography for Ulsis

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