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Simox 086341334X Book Cover

Simox

Edition Description

SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.

The content includes an historical perspective...

Edition Details
Format:Hardcover
Language:English
ISBN:086341334X
Format: Hardcover
Condition:
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