Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

By Alexey Ivanov and Alexey Ivanov

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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• Format: Paperback
• Language: English
• ISBN: 3658192372
• ISBN13: 9783658192372
• Release Date: September 2017
• Publisher: Springer Vieweg
• Length: 316 Pages
• Weight: 0.92 lbs.
• Dimensions: 0.7" x 5.8" x 8.3"