Si Front-End Processing: Volume 669: Physics and Technology of Dopant-Defect Interactions III

This book focuses on the phenomena which control the three-dimensional dopant profile in deep submicron devices. As device sizes continue to shrink, increasing the dopant activation while... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 110741220X
• ISBN13: 9781107412200
• Release Date: June 2014
• Publisher: Cambridge University Press
• Length: 356 Pages
• Weight: 1.05 lbs.
• Dimensions: 0.7" x 6.0" x 9.0"