Si Front-End Processing: Volume 568: Physics and Technology of Dopant-Defect Interactions

Electrical device parameters are largely set by the three-dimensional dopant profiles created during front-end processing. Ion implantation, silicidation and annealing treatments in various ambients... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 1558994750
• ISBN13: 9781558994751
• Release Date: July 1999
• Publisher: Cambridge University Press
• Length: 298 Pages
• Weight: 1.35 lbs.
• Dimensions: 0.9" x 6.2" x 9.1"