Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

By Joachim Frühauf

Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.

• Format: Paperback
• Language: English
• ISBN: 364206048X
• ISBN13: 9783642060489
• Release Date: October 2010
• Publisher: Springer
• Length: 222 Pages
• Weight: 0.74 lbs.
• Dimensions: 0.5" x 6.1" x 9.2"