Semiconductor Wafer Cleaning Using Megasonics

By Keswani Manish

Megasonic cleaning is routinely used in the semiconductor industry to remove particle contaminants from wafer and mask surfaces. Cleaning is achieved through proper choice of chemical solutions, power... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3639090306
• ISBN13: 9783639090307
• Release Date: November 2008
• Publisher: VDM Verlag Dr. Mueller E.K.
• Length: 172 Pages
• Weight: 0.52 lbs.
• Dimensions: 0.4" x 6.0" x 9.0"