Semiconductor Sensors

Book Overview

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

• Format: Hardcover
• Language: English
• ISBN: 0471546097
• ISBN13: 9780471546092
• Release Date: October 1994
• Publisher: Wiley-Interscience
• Length: 576 Pages
• Weight: 2.20 lbs.
• Dimensions: 1.3" x 6.4" x 9.6"