Semiconductor Lithography: Principles, Practices, and Materials

By Wayne M. Moreau

Book Overview

Softcover Repri

• Format: Paperback
• Language: English
• ISBN: 1461282284
• ISBN13: 9781461282280
• Release Date: February 2012
• Publisher: Springer
• Length: 952 Pages
• Weight: 3.27 lbs.
• Dimensions: 1.9" x 6.7" x 9.6"

Customer Reviews

Lithography

This is the most comprehensive book about semiconductor lithography available today. It holds information on every aspect of optical lithography for people new in this field. And it is a valuable handbook and source for processing resist for those already familiar with SC lithography.