Semiconductor Lithography: Principles, Practices, and Materials

By Wayne M. Moreau

Book Overview

Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 1461282284
• ISBN13: 9781461282280
• Release Date: February 2012
• Publisher: Springer
• Length: 952 Pages
• Weight: 3.27 lbs.
• Dimensions: 1.9" x 6.7" x 9.6"

Customer Reviews

Lithography

This is the most comprehensive book about semiconductor lithography available today. It holds information on every aspect of optical lithography for people new in this field. And it is a valuable handbook and source for processing resist for those already familiar with SC lithography.