Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)

By Alfred Kwok-Kit Wong

The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. As IC device dimensions... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0819439959
• ISBN13: 9780819439956
• Release Date: March 2001
• Publisher: SPIE Publications
• Length: 234 Pages
• Weight: 1.25 lbs.
• Dimensions: 10.0" x 0.5" x 7.3"