Rapid Thermal Processing: Science and Technology

By Richard B. Fair

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0122476905
• ISBN13: 9780122476907
• Release Date: April 1993
• Publisher: Academic Press
• Length: 430 Pages
• Weight: 1.72 lbs.
• Dimensions: 1.0" x 6.3" x 9.3"