Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)

By Harry J. Levinson

This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0819456608
• ISBN13: 9780819456601
• Release Date: February 2005
• Publisher: SPIE Publications
• Length: 438 Pages
• Weight: 2.45 lbs.
• Dimensions: 10.3" x 1.3" x 7.3"