Polycrystalline Silicon for Integrated Circuits and Displays

By Theodore I. Kamins and Ted Kamins

1998

• Format: Hardcover
• Language: English
• ISBN: 0792382242
• ISBN13: 9780792382249
• Release Date: July 1998
• Publisher: Springer
• Length: 393 Pages
• Weight: 1.72 lbs.
• Dimensions: 1.1" x 6.4" x 9.6"

Customer Reviews

Great book about Poly

This is the essential book about poly if your life, like mine, revolves entirely around poly. This well-written book contains basic information on the deposition, film properties, and electrical characteristics of poly-Si, as well as the techniques used to analyze poly-Si. The references are invaluable. There has been substantial development on the application of poly, like logic gate electrode, and on single-wafer deposition since this book was published, but I would not start reading the latest literature without reading Kamins first. I wish every step in the chip manufacturing process had as thurough a treatment as poly-Si gets here.