Plasma Processing of Semiconductors

By P.F. Williams

Book Overview

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

• Format: Paperback
• Language: English
• ISBN: 9401064865
• ISBN13: 9789401064866
• Release Date: October 2012
• Publisher: Springer
• Length: 613 Pages
• Weight: 1.91 lbs.
• Dimensions: 1.3" x 6.1" x 9.2"