Plasma Etching: An Introduction (Plasma : Materials Interactions)

By: Manos, Dennis M.

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0124693709
• ISBN13: 9780124693708
• Release Date: August 1989
• Publisher: Elsevier Science & Technology
• Length: 476 Pages
• Weight: 1.80 lbs.
• Dimensions: 9.5" x 1.0" x 6.3"