Plasma Electronics: Applications in Microelectronic Device Fabrication

By Zoran Lj Petrovic and Toshiaki Makabe

Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.

• Format: Paperback
• Language: English
• ISBN: 1138034150
• ISBN13: 9781138034150
• Release Date: October 2016
• Publisher: CRC Press
• Length: 412 Pages
• Weight: 1.27 lbs.
• Dimensions: 0.8" x 6.1" x 9.2"