Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

By Youngsoo Shin and Seongbo Shim

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 3319762931
• ISBN13: 9783319762937
• Release Date: April 2018
• Publisher: Springer
• Length: 138 Pages
• Weight: 0.87 lbs.
• Dimensions: 0.4" x 6.1" x 9.2"