Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

By Janusz Bogdanowicz

Book Overview

Theory of Perturbation of the Reflectance.- Theory of Perturbation of the Refractive Index.- Theory of Carrier and Heat Transport in Homogeneously Doped Silicon.- Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers.- Assessment of the Model.- Application of the Model to Carrier Profling.

• Format: Hardcover
• Language: English
• ISBN: 364230107X
• ISBN13: 9783642301070
• Release Date: June 2012
• Publisher: Springer
• Length: 204 Pages
• Weight: 1.00 lbs.
• Dimensions: 0.7" x 6.2" x 9.2"