Particle Control for Semiconductor Manufacturing

By R.P. Donovan

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

• Format: Hardcover
• Language: English
• ISBN: 0824782429
• ISBN13: 9780824782429
• Release Date: January 1990
• Publisher: CRC Press
• Length: 480 Pages
• Weight: 1.35 lbs.
• Dimensions: 10.5" x 1.0" x 7.3"