Oxygen in Silicon, Volume 42 (Semiconductors & Semimetals)

By Albert C. Beer

This volume reviews the latest understanding of the behaviour and roles of oxygen in silicon from the experimental and theoretical points of view. Written by authorities from industrial and academic institutions, the chapters of the text cover oxygen-related phenomena from crystal growth to device fabrication processes, as well as diagnostic techniques. Coverage also includes discussion of silicon crystals for VLSI and ULSI applications.

• Format: Hardcover
• Language: English
• ISBN: 0127521429
• ISBN13: 9780127521428
• Release Date: August 1994
• Publisher: Academic Press
• Length: 679 Pages
• Weight: 2.42 lbs.
• Dimensions: 9.0" x 1.3" x 6.3"