Organic Peracid Etches

By Daniel Georg Possner

Delineation of crystalline defects in silicon substrates and thin films by chemical etching in combination with light optical microscopy is a well established method for quality control. It is still... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3838118537
• ISBN13: 9783838118536
• Release Date: September 2010
• Publisher: Sudwestdeutscher Verlag Fur Hochschulschrifte
• Length: 192 Pages
• Weight: 0.64 lbs.
• Dimensions: 0.4" x 6.0" x 9.0"