Optical Inspection of Microsystems, Second Edition

This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.

• Format: Hardcover
• Language: English
• ISBN: 1498779476
• ISBN13: 9781498779470
• Release Date: June 2019
• Publisher: CRC Press
• Length: 570 Pages
• Weight: 2.90 lbs.
• Dimensions: 1.3" x 7.2" x 10.1"