Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)

By Alfred Kwok-Kit Wong

An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0819458295
• ISBN13: 9780819458292
• Release Date: March 2005
• Publisher: SPIE Publications
• Length: 276 Pages
• Weight: 1.30 lbs.
• Dimensions: 9.8" x 0.5" x 6.8"