Optical Diagnostics for Thin Film Processing

By Irving P. Herman and Irving P. Herman Ph.D. Massachusetts Institute of Technology

This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0123420709
• ISBN13: 9780123420701
• Release Date: October 1995
• Publisher: Academic Press
• Length: 783 Pages
• Weight: 2.67 lbs.
• Dimensions: 1.7" x 6.3" x 9.3"